JPH0528756Y2 - - Google Patents

Info

Publication number
JPH0528756Y2
JPH0528756Y2 JP1986114790U JP11479086U JPH0528756Y2 JP H0528756 Y2 JPH0528756 Y2 JP H0528756Y2 JP 1986114790 U JP1986114790 U JP 1986114790U JP 11479086 U JP11479086 U JP 11479086U JP H0528756 Y2 JPH0528756 Y2 JP H0528756Y2
Authority
JP
Japan
Prior art keywords
boat
vertical
wafers
present
charging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986114790U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320426U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986114790U priority Critical patent/JPH0528756Y2/ja
Publication of JPS6320426U publication Critical patent/JPS6320426U/ja
Application granted granted Critical
Publication of JPH0528756Y2 publication Critical patent/JPH0528756Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986114790U 1986-07-25 1986-07-25 Expired - Lifetime JPH0528756Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (en]) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986114790U JPH0528756Y2 (en]) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320426U JPS6320426U (en]) 1988-02-10
JPH0528756Y2 true JPH0528756Y2 (en]) 1993-07-23

Family

ID=30997847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986114790U Expired - Lifetime JPH0528756Y2 (en]) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0528756Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3131601B2 (ja) * 1995-03-02 2001-02-05 東京エレクトロン株式会社 熱処理装置及び熱処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61212014A (ja) * 1985-03-18 1986-09-20 Tokyo Erekutoron Kk 化学的気相成長法による半導体ウエハ処理装置

Also Published As

Publication number Publication date
JPS6320426U (en]) 1988-02-10

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